자료유형 | 단행본 |
---|---|
개인저자 | Reif Rafael Heyns Marc Bowling Allen Tonti Alessandro |
서명/저자사항 | Environmental, Safety, and Health Issues in IC Production /Rafael Reif;Marc Heyns;Allen Bowling;Alessndro Tonti. |
발행사항 | United States:Materials Research Society,1997 |
형태사항 | 154p,24cm |
총서사항 | Symposium Proceedings;volume 447 |
ISBN | 1-55899-351-7 |
서지주기 | 색인수록 |