| LDR | 00461namk 00157 k 4500 | |
|---|---|---|
| 001 | 000000049537 | |
| 005 | 20120521133403 | |
| 008 | 120521s2012 us 000a eng | |
| 049 | ▼l WM00009062 | |
| 056 | ▼a 530.029 | |
| 090 | ▼a 530.029 ▼b S471e | |
| 110 | ▼a SEMI. | |
| 245 | 10 | ▼a Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (SEMI S2-0310e) / ▼d SEMI |
| 260 | ▼a United States: ▼b SEMI, ▼c 2012 | |
| 300 | ▼a 135p , ▼c 30cm | |
| 950 | 0 | ▼a 구입 |