LDR | 00000nam k2200205 k 4500 | |
---|---|---|
001 | 000000053671 | |
005 | 20170511151827 | |
008 | 170511s2016 us 000a eng | |
049 | ▼l WM00009568 | |
056 | ▼a 530.029 | |
090 | ▼a 530.029 ▼b S471e | |
110 | ▼a SEMI. | |
245 | 10 | ▼a Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (SEMI S2-1016b) / ▼d SEMI |
260 | ▼a United States: ▼b SEMI, ▼c 2016 | |
300 | ▼a 161p, ▼c 30cm | |
950 | 0 | ▼a 구입 |