| LDR | 00000nam k2200205 k 4500 | |
|---|---|---|
| 001 | 000000053672 | |
| 005 | 20170511152234 | |
| 008 | 170511s2007 us 000a eng | |
| 049 | ▼l WM00009569 | |
| 056 | ▼a 530.029 | |
| 090 | ▼a 530.029 ▼b S471e | |
| 110 | ▼a SEMI. | |
| 245 | 10 | ▼a EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment (SEMI S6-0707E) / ▼d SEMI |
| 260 | ▼a United States: ▼b SEMI, ▼c 2007 | |
| 300 | ▼a 73p, ▼c 30cm | |
| 950 | 0 | ▼a 구입 |